欧盟法规
ECHA物质C&L通报REACH预注册专利信息
专利号:US-11542600-B2
优先权日:2009-10-26
标题 :Synthesis and use of precursors for ALD of group VA element containing thin films
专利号:US-11814400-B2
优先权日:2008-04-25
标 题 :Synthesis and use of precursors for ALD of tellurium and selenium thin films