专利号:US-8507040-B2 优先权日:2008-05-08 标题:Binary and ternary metal chalcogenide materials and method of making and using same 发明人:XIAO MANCHAO; LEI XINJIAN; YANG LIU 权利人:XIAO MANCHAO; LEI XINJIAN; YANG LIU; AIR PROD & CHEM 摘要:This invention discloses the synthesis of metal chalcogenides using chemical vapor deposition (CVD) process, atomic layer deposition (ALD) process, or wet solution process. Ligand exchange reactions of organosilyltellurium or organosilylselenium with a series of metal compounds having neucleophilic substituents generate metal chalcogenides. This chemistry is used to deposit germanium-antimony-tellurium (GeSbTe) and germanium-antimony-selenium (GeSbSe) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.
专利号:US-8765223-B2 优先权日:2008-05-08 标题 :Binary and ternary metal chalcogenide materials and method of making and using same 发明人:XIAO MANCHAO; YANG LIU 权利人:XIAO MANCHAO; YANG LIU; AIR PROD & CHEM 摘要:This invention discloses the synthesis of metal chalcogenides using chemical vapor deposition (CVD) process, atomic layer deposition (ALD) process, or wet solution process. Ligand exchange reactions of organosilyltellurium or organosilylselenium with a series of metal compounds having neucleophilic substituents generate metal chalcogenides. This chemistry is used to deposit germanium-antimony-tellurium (GeSbTe) and germanium-antimony-selenium (GeSbSe) films or other tellurium and selenium based metal compounds for phase change memory and photovoltaic devices.