CAS: 19824-55-6; Tetrakis(Diethylamido)Hafnium(Iv)

该化合物是一种有机金属化合物,在四乙基氨基离心(IV)的四倍氧化状态下,其特性是无色的,在室温下,不光彩的黄色液体,以其挥发性和相对低的粘度而著称,使该物质适合化学蒸气沉降过程,特别是在半导体工业中,用于沉积氢氧化亚胺薄膜.二乙基氨基化合物增强溶解性和再活性,使各种化学工艺更容易处理和操作.四乙基氨基(IV)对湿气和空气十分敏感,需要谨慎储存和处理惰性大气,以防止水解和氧化.其热稳定性和再活性使其在材料科学中成为有价值的前体,特别是在制造高k二电和其他先进材料时.由于具有潜在的毒性和再反应性,在与该化合物合作时,安全防范至关重要.

结构式图片

相似化合物

352535-01-4 19782-68-4

欧盟法规

C&L通报

合成工艺路线路线简述

    N-乙基甲基胺,氯化铪置于正丁基锂体系中,用 乙二醇二甲醚,甲苯,Hexanes 用作溶剂,以85.8%的收率获得四(二乙基氨基)铪(Iv)
    参考文献: Processes For Producing Transition Metal Amido And Imido Compounds[fr] Procédés De Production De Composés Amido Et Imido De Métaux De Transition
    标题: Processes For Producing Transition Metal Amido And Imido Compounds[fr] Procédés De Production De Composés Amido Et Imido De Métaux De Transition

    海关参考信息

    专利信息


    专利号:US-8859785-B2
    优先权日:2009-05-29
    标 题 :Volatile group 2 metal precursors
    发明人:NORMAN JOHN ANTHONY THOMAS
    权利人:NORMAN JOHN ANTHONY THOMAS; AIR PROD & CHEM
    摘要:A compound comprising one or more polyfunctionalized pyrrolyl anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-pyrrolyl anion. n Synthesis of the novel compounds and their use to form BST films is also contemplated.

    专利号:US-12043893-B2
    优先权日:2017-08-24
    标题:Manufacturing processes to synthesize, functionalize, surface treat and/or encapsulate powders, and applications thereof
    发明人:KING DAVID; DAMERON ARRELAINE; TREVEY JAMES; LICHTY PAUL; ARGO ANDREW; BOURGOIS KYLE; RAGONESI JAMES; INGHAM KYLE; JACKSON DAVID; TRACY RYON; NGUYEN NGHI; LYON ADAM; VILLAGOMEZ JOSE; CURRY GARRETT
    权利人:FORGE NANO INC
    摘要:A system, apparatus and method are provided for processing articles. The system includes subsystems for synthesizing, pre-treating, conducting a vapor phase coating process and post-treating articles in the form of powders and solid or porous workpieces. The apparatus permits vapor phase synthesis, treatment and deposition processes to be performed with high efficiency and at high overall throughput. The methods include converting solids, liquids or gases into gaseous and solid streams that can be separated or exchanged with or without treatment and/or coating steps, and produce optimized composite articles for specific applications.

    专利号:CN-111279015-B
    优先权日:2017-08-24
    标 题 :Manufacturing processes for synthesis, functionalization, surface treatment and/or encapsulation of powders and their applications
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    合成参考文献


    参考文献:10.1134/s0022476623030083
    摘要:Petukhova DE, Vikulova ES, Korolkov IV, Khmel SY, Lebedev MS. Growth Features and Phase Composition of Hf–Sc–O thin Films Synthesized by Atomic Layer Deposition. J Struct Chem. 2023 Mar;64(3):424–36. doi: 10.1134/s0022476623030083.
    参考文献:10.1007/s11664-025-11865-z
    摘要:Atuchin VV, Lebedev MS, Gromilov SA, Korolkov IV, Perevalov TV, Prosvirin IP. Growth and Characterization of Mixed Oxide Hf1−xScxOy (0 ≤ x ≤ 1) Films Prepared by the Atomic Layer Deposition Method. J. Electron. Mater. 2025 Mar 12;54(6):4832–45. doi: 10.1007/s11664-025-11865-z.
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