CAS: 352535-01-4; Ethyl(Methyl)Azanide,Hafnium(4+)

该化合物是一种金属有机前体,用于化学蒸气沉降(CVD)和原子层沉降(ALD)过程,用于基于基薄膜的薄膜,其主要优点包括高度挥发性和热稳定性,能够精确控制胶片的成分和统一性.该化合物的活性乙基甲基氨离心膜有助于低温沉积,使之适合温度敏感的子质层.它对于生产高--二电层,如氧化(HfO2)的半导体制造特别有价值,这对先进的逻辑和记忆装置至关重要.前体的一贯纯度和可靠性能有助于复制胶片特性,满足严格的工业要求.

结构式图片

欧盟法规

C&L通报

合成工艺路线路线简述

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    专利信息


    专利号:US-7144563-B2
    优先权日:2004-04-22
    标题:Synthesis of branched carbon nanotubes
    发明人:RAO APPARAO M; GOTHARD NICHOLAS W; GAILLARD JAY B
    权利人:UNIV CLEMSON
    摘要:The present invention discloses a relatively simple CVD method for forming branched carbon nanotubes. In general, the method includes adding a dopant to the precursor materials. The dopant can be a material that has a thermodynamically more favorable carbide-forming reaction at the reactor conditions than does the catalyst that is provided to the reactor by a second precursor material. The doped nanoparticles formed in the reactor can adhere to the walls of the developing nanotubes and provide a nucleation site for the development of one or more branches on the nanotube. The nanotubes formed according to the invention can be recognized as such due to the presence of the doped nanoparticles adhered along the walls of the branched nanotubes.

    专利号:US-8859785-B2
    优先权日:2009-05-29
    标 题 :Volatile group 2 metal precursors
    发明人:NORMAN JOHN ANTHONY THOMAS
    权利人:NORMAN JOHN ANTHONY THOMAS; AIR PROD & CHEM
    摘要:A compound comprising one or more polyfunctionalized pyrrolyl anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-pyrrolyl anion. n Synthesis of the novel compounds and their use to form BST films is also contemplated.

    专利号:US-2005238566-A1
    优先权日:2004-04-22
    标题:Novel synthesis of branched carbon nanotubes

    专利号:CN-111279015-B
    优先权日:2017-08-24
    标 题 :Manufacturing processes for synthesis, functionalization, surface treatment and/or encapsulation of powders and their applications

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    ✅ COA系统入驻 | 共享模式

    合成参考文献


    参考文献:10.1038/s41563-019-0418-0
    摘要:Grim JQ, Bracker AS, Zalalutdinov M, Carter SG, Kozen AC, Kim M, Kim CS, Mlack JT, Yakes M, Lee B, Gammon D. Scalable in operando strain tuning in nanophotonic waveguides enabling three-quantum-dot superradiance. Nat Mater. 2019 Sep;18(9):963–9. doi: 10.1038/s41563-019-0418-0.
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