CAS: 14781-45-4; Copper(Ii)Hexafluor-2,4-Pentanedionate

该化合物是一个高度稳定,挥发性很强的铜(II) β-diketonate复合体,其主要优点包括极好的热稳定性和高蒸汽压力,使其特别适合用于半导体和薄膜制造中的化学蒸汽沉降(CVD)和原子层沉积(ALD)应用;氟离子增强有机溶剂的溶解性,并改进前体制剂的再活性;该化合物广泛用于含有铜的薄膜的合成,其纯度和统一性很高;其一贯的分解特征确保了对沉积过程的精确控制,使其更倾向于先进的电子和光电子应用.

结构式图片

欧盟法规

ECHA物质ECHA物质C&L通报REACH预注册

上下游产品

CAS号1522-22-1 六氟乙酰丙酮 | CAS号6046-93-1 醋酸铜 | CAS号142-71-2 醋酸铜 | CAS号20427-59-2 氢氧化铜

合成工艺路线路线简述

    Yttrium(III)Hexafluoroacetylacetonate Dihydrate*copper(II)Acetylacetonate 反应生成双(六氟乙酰丙酮)合铜(II)
    参考文献:Kuz'Mina; Kupriyanova; Troyanov,Russian Journal Of Coordination Chemistry,2000,Vol. 26,# 5,P. 367-372
    标题:Kuz'Mina; Kupriyanova; Troyanov,Russian Journal Of Coordination Chemistry,2000,Vol. 26,# 5,P. 367-372

    海关参考信息

    专利信息


    专利号:US-6015918-A
    优先权日:1998-11-10
    标 题 :Allyl-derived precursor and synthesis method
    发明人:ZHUANG WEI-WEI; NGUYEN TUE; STECKER GREG MICHAEL; EVANS DAVID RUSSELL; HSU SHENG TENG
    权利人:SHARP LAB OF AMERICA INC
    摘要:A Cu(hfac) allyl-derived ligand precursor has been provided. The ligand includes group consisting of alkyl, phenyl, trialkylsilane, trialkoxylsilane, halodialkylsilane, dihaloalkylsilane, trihalosilane, triphenylsilane, alkoxyl, halogen, chloroformate, cynanide, cycloalkyl, cycloalkylamine, alkyl ether, isocyanate, and pentafluorobenzene. Examples of the allyl-derived ligand precursors have proved to be stable at room temperatures, and sufficiently volatile at higher temperatures. Copper deposited with this precursor has low resistivity and high adhesive characteristics. A synthesis method has been provided which produces a high yield of the above-described precursors, including a Cu(hfac)(allyltrimethylsilane) precursor.

    专利号:US-5994571-A
    优先权日:1998-11-10
    标题 :Substituted ethylene precursor and synthesis method
    发明人:ZHUANG WEI-WEI; NGUYEN TUE; CHARNESKI LAWRENCE J; EVANS DAVID RUSSELL; HSU SHENG TENG
    权利人:SHARP LAB OF AMERICA INC
    摘要:A Cu(hfac) precursor with a substituted ethylene ligand has been provided. The substituted ethylene ligand includes bonds to molecules selected from the group consisting of C 1 to C 8 alkyl, C 1 to C 8 haloalkyl, H, and C 1 to C 8 alkoxyl. One variation, the 2-methyl-1-butene ligand precursor has proved to be stable at room temperature, and extremely volatile at higher temperatures. Copper deposited with this precursor has low resistivity and high adhesive characteristics. Because of the volatility, the deposition rate of copper deposited with this precursor is very high. A synthesis method has been provided which produces a high yield of the above-described precursor.

    专利号:US-6669870-B2
    优先权日:1998-12-11
    标题:Substituted phenylethylene precursor synthesis method
    发明人:ZHUANG WEI-WEI; NGUYEN TUE; CHARNESKI LAWRENCE J; EVANS DAVID R; HSU SHENG TENG
    权利人:SHARP LAB OF AMERICA INC
    摘要:A Cu(hfac) precursor with a substituted phenylethylene ligand has been provided. The substituted phenylethylene ligand includes bonds to molecules selected from the group consisting of C1 to C6 alkyl, C1 to C6 haloalkyl, C1 to C6 phenyl, H and C1 to C6 alkoxyl. One variation, the alpha-methylstyrene ligand precursor has proved to be stable a low temperatures, and sufficiently volatile at higher temperatures. Copper deposited with this precursor has low resistivity and high adhesive characteristics. A synthesis method has been provided which produces a high yield of the above-described precursor.

    专利号:US-10954139-B2
    优先权日:2015-12-11
    标 题:Oleophilic foams for oil spill mitigation
    发明人:DARLING SETH B; ELAM JEFFREY W; MANE ANIL U
    权利人:UCHICAGO ARGONNE LLC
    摘要:A method of fabricating an oleophilic foam includes providing a foam comprising a base material. The base material is coated with an inorganic material using at least one of an atomic layer deposition (ALD), a molecular layer deposition (MLD) or sequential infiltration synthesis (SIS) process. The SIS process includes at least one cycle of exposing the foam to a first metal precursor for a first predetermined time and a first partial pressure. The first metal precursor infiltrates at least a portion of the base material and binds with the base material. The foam is exposed to a second co-reactant precursor for a second predetermined time and a second partial pressure. The second co-reactant precursor reacts with the first metal precursor, thereby forming the inorganic material on the base material. The inorganic material infiltrating at least the portion of the base material. The inorganic material is functionalized with an oleophilic material.

    专利号:US-11351478-B2
    优先权日:2018-09-06
    标题 :Oil skimmer with oleophilic coating
    发明人:DARLING SETH B; ELAM JEFFREY W
    权利人:UCHICAGO ARGONNE LLC
    摘要:A method of fabricating an coating includes providing a coating comprising a base material. The base material is coated with an inorganic material using at least one of an atomic layer deposition (ALD), a molecular layer deposition (MLD), or sequential infiltration synthesis (SIS) process. The SIS process includes at least one cycle of exposing the coating to a first metal precursor for a first predetermined time and a first partial pressure. The first metal precursor infiltrates at least a portion of the base material and binds with the base material. The coating is exposed to a second co-reactant precursor for a second predetermined time and a second partial pressure. The second co-reactant precursor reacts with the first metal precursor, thereby forming the inorganic material on the base material. The inorganic material infiltrating at least the portion of the base material. The inorganic material is functionalized with a material.

    专利号:US-10870917-B2
    优先权日:2016-07-08
    标 题:Functionalized foams
    发明人:DARLING SETH B; ELAM JEFFREY W; MANE ANIL U; SNYDER SETH W
    权利人:UCHICAGO ARGONNE LLC
    摘要:A method of fabricating an foam includes providing a foam comprising a base material. The base material is coated with an inorganic material using at least one of an atomic layer deposition (ALD), a molecular layer deposition (MLD), or sequential infiltration synthesis (SIS) process. The SIS process includes at least one cycle of exposing the foam to a first metal precursor for a first predetermined time and a first partial pressure. The first metal precursor infiltrates at least a portion of the base material and binds with the base material. The foam is exposed to a second co-reactant precursor for a second predetermined time and a second partial pressure. The second co-reactant precursor reacts with the first metal precursor, thereby forming the inorganic material on the base material. The inorganic material infiltrating at least the portion of the base material. The inorganic material is functionalized with a material.
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    合成参考文献

    合成方法参考DOI号:10.1016/j.apcata.2017.06.012
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