专利号:US-10669160-B2 优先权日:2018-04-30 标题:Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide 发明人:LIU YUMIN; LI FENG; WAN ZHIWEN; FAFARD CLAUDIA; WIESE STEFAN; HUSSON GUILLAUME; NIKIFOROV GRIGORY; SUI BIN; GIRARD JEAN-MARC 权利人:AIR LIQUIDE; AIR LIQUIDE AMERICAN 摘要:Synthesis of tungsten pentahalide compositions having low impurity profiles are disclosed. The specific impurity profile permits deposition of high purity tungsten-containing films using vapor deposition processes or other semiconductor manufacturing processes without introduction of performance-impacting contaminants.
专利号:CN-107400053-A 优先权日:2017-07-21 标 题 :A kind of green synthesis method of ethyl difluorobromoacetate
专利号:US-2019330076-A1 优先权日:2018-04-30 标 题 :Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
专利号:US-2020325036-A1 优先权日:2018-04-30 标 题:Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
专利号:ES-2690055-T3 优先权日:2012-02-28 标题 :Synthesis procedure of trifluoroethylene from chlorotrifluoroethylenenotrifluoroethylene