CAS: 18407-94-8; Tetrakis(2-Ethoxyethyl) Orthosilicate

上下游产品

2-ethoxy-ethanol tetraethoxy orthosilicate

📜乙二醇乙醚,硅酸四乙酯 以94%的收率获得四乙氧基乙基原硅酸
参考文献:Studies In Silico-Organic Compounds. V. The Preparation And Properties Of Certain Polyethers From Tetrachlorosilane,Hexachlorodisilane,And Hexachlorodisiloxane1
标题:Studies In Silico-Organic Compounds. V. The Preparation And Properties Of Certain Polyethers From Tetrachlorosilane,Hexachlorodisilane,And Hexachlorodisiloxane1
摘要:
Doi:10.1021/jo01160A016

专利信息

专利号:US-6495208-B1
优先权日:1999-09-09
标 题 :Near-room temperature CVD synthesis of organic polymer/oxide dielectric nanocomposites
发明人：DESU SESHU B; SENKEVICH JOHN J
权利人:VIRGINIA TECH INTELL PROP
摘要:Nanocomposite thin films with low dielectric constants are made by the simultaneous deposition of an oxide dielectric and an organic polymer at near room temperatures. Suitable oxides include SiO 2 , and suitable organic polymers include poly(chloro-para-xylylene). The two dielectric materials, when deposited, form nanocomposites characterized by nanometer-sized domains of dielectric material. The nanocomposite thin films of this invention are useful as dielectric layers for interlevel dielectric (ILD) and intermetal dielectric (IMD) dielectrics in the manufacture of semiconductor devices as well as for thin films for flat panel displays, food wraps, hybrid ceramics, glass, hard disk drives, and optical disk drives. Additionally, the invention comprises semiconductor devices and semiconductor chips made incorporating nanocomposites deposited by chemical vapor deposition.