专利号:US-10669160-B2 优先权日:2018-04-30 标题:Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide 发明人:LIU YUMIN; LI FENG; WAN ZHIWEN; FAFARD CLAUDIA; WIESE STEFAN; HUSSON GUILLAUME; NIKIFOROV GRIGORY; SUI BIN; GIRARD JEAN-MARC 权利人:AIR LIQUIDE; AIR LIQUIDE AMERICAN 摘要:Synthesis of tungsten pentahalide compositions having low impurity profiles are disclosed. The specific impurity profile permits deposition of high purity tungsten-containing films using vapor deposition processes or other semiconductor manufacturing processes without introduction of performance-impacting contaminants.
专利号:US-5084589-A 优先权日:1991-07-15 标题:Process for synthesis of methoxy substituted methylsilanes 发明人:LEGROW GARY E 权利人:DOW CORNING 摘要:The present invention is a process for the production of selected methoxysilanes in high yield. The process involves reacting methanol with a silazane at a temperature greater than the boiling point of product methoxysilane and less than the temperature of methanol. Under these temperature conditions rapid removal of product methoxysilanes from the reaction mixture occurs minimizing undesirable reactions which can reduce yield of the process. The described process has been found useful for the production of dimethylmethoxysilane, dimethyldimethoxysilane, and methyldimethoxysilane.
专利号:US-2019330076-A1 优先权日:2018-04-30 标 题 :Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
专利号:US-2020325036-A1 优先权日:2018-04-30 标 题:Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide
专利号:TW-I760607-B 优先权日:2018-04-30 标 题:Heterogeneous wet synthesis process for preparation of high purity tungsten pentahalide