专利号:US-2025197431-A1 优先权日:2023-12-15 标 题:Methods and systems for forming a layer comprising silicon and composition and synthesis of silicon precursor 发明人:ROMERO PATRICIO EDUARDO; VERVUURT RENÉ HENRICUS JOZEF; DEZELAH CHARLES; PORE VILJAMI J 权利人:ASM IP HOLDING BV 摘要:Disclosed are methods and systems for forming a silicon-containing layer on a substrate. Further disclosed are composition and synthesis of silicon-containing precursor. The methods for forming a silicon-containing layer comprise executing a plurality of deposition cycles. A deposition cycle comprises a first precursor pulse that comprises exposing the substrate to a first precursor. The first precursor comprises a molecule comprising a P—Si bond. A deposition cycle further comprises a plasma pulse that comprises exposing the substrate to a plasma treatment. The plasma treatment comprises generating a plasma.
专利号:US-12291489-B2 优先权日:2016-07-01 标 题 :Synthesis of nanocomposites and their use in enhancing plant nutrition 发明人:BISWAS PRATIM; RALIYA RAMESH 权利人:BISWAS PRATIM; RALIYA RAMESH; WASHINGTON UNIVERSITY ST LOUIS 摘要:The present disclosure is related to the development of improved fertilizer for precision and sustainable agriculture. A method was developed wherein efficient NPK nanocomposite for plant nutrition was synthesized in a single step using aerosol science and technology concepts. Further a formulation was prepared by addition of ZnO, TiO 2 and other nanoparticles to the NPK nanocomposite. Also, an aerosol based foliar application technique was developed for the precise delivery of nanoparticles to the plants.
专利号:US-2019202750-A1 优先权日:2016-07-01 标 题 :Synthesis of nanocomposites and their use in enhancing plant nutrition
专利号:WO-2025129004-A1 优先权日:2023-12-15 标题:Methods and systems for forming a layer comprising silicon and composition and synthesis of silicon precursor
专利号:WO-2018005930-A1 优先权日:2016-07-01 标题:Synthesis of nanocomposites and their use in enhancing plant nutrition