CAS: 4419-47-0; Tetrakis(Diethylamino)Titanium

该化合物是一种金属有机前体,广泛用于化学蒸气沉降(CVD)和原子层沉降(ALD)过程,用于硝酸铵和氧化钛薄膜(TiO2),其主要优点包括高挥发性,极好的热稳定性和低分解温度,使薄膜在工艺温度降低时能够精确生长.二乙基氨离心剂有助于清洁分解,在沉积的胶片中尽量减少碳污染.

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CAS号7550-45-0 四氯化钛 | CAS号109-89-7 二乙胺 | CAS号813-55-8 titanium bis(di... | CAS号6607-37-0 titanium tris(d... | CAS号31011-57-1 氯化钛(IV) 四氢呋喃复合物 | CAS号816-43-3 二乙氨基锂 | CAS号1950-58-9 2-Butenamide,N,... | CAS号3167-69-9 N-diethoxyphosp... | CAS号616-39-7 N,N-二乙基甲胺 | CAS号83188-05-0 3-(diethylamino... | CAS号5515-83-3 乙醇合三氯乙醛 | CAS号5351-01-9 3-(二乙氨基)丙酸甲酯

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    专利信息


    专利号:US-7144563-B2
    优先权日:2004-04-22
    标题:Synthesis of branched carbon nanotubes
    发明人:RAO APPARAO M; GOTHARD NICHOLAS W; GAILLARD JAY B
    权利人:UNIV CLEMSON
    摘要:The present invention discloses a relatively simple CVD method for forming branched carbon nanotubes. In general, the method includes adding a dopant to the precursor materials. The dopant can be a material that has a thermodynamically more favorable carbide-forming reaction at the reactor conditions than does the catalyst that is provided to the reactor by a second precursor material. The doped nanoparticles formed in the reactor can adhere to the walls of the developing nanotubes and provide a nucleation site for the development of one or more branches on the nanotube. The nanotubes formed according to the invention can be recognized as such due to the presence of the doped nanoparticles adhered along the walls of the branched nanotubes.

    专利号:US-8859785-B2
    优先权日:2009-05-29
    标 题 :Volatile group 2 metal precursors
    发明人:NORMAN JOHN ANTHONY THOMAS
    权利人:NORMAN JOHN ANTHONY THOMAS; AIR PROD & CHEM
    摘要:A compound comprising one or more polyfunctionalized pyrrolyl anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-pyrrolyl anion. n Synthesis of the novel compounds and their use to form BST films is also contemplated.

    专利号:US-2005238566-A1
    优先权日:2004-04-22
    标题:Novel synthesis of branched carbon nanotubes

    专利号:US-12043893-B2
    优先权日:2017-08-24
    标题:Manufacturing processes to synthesize, functionalize, surface treat and/or encapsulate powders, and applications thereof
    发明人:KING DAVID; DAMERON ARRELAINE; TREVEY JAMES; LICHTY PAUL; ARGO ANDREW; BOURGOIS KYLE; RAGONESI JAMES; INGHAM KYLE; JACKSON DAVID; TRACY RYON; NGUYEN NGHI; LYON ADAM; VILLAGOMEZ JOSE; CURRY GARRETT
    权利人:FORGE NANO INC
    摘要:A system, apparatus and method are provided for processing articles. The system includes subsystems for synthesizing, pre-treating, conducting a vapor phase coating process and post-treating articles in the form of powders and solid or porous workpieces. The apparatus permits vapor phase synthesis, treatment and deposition processes to be performed with high efficiency and at high overall throughput. The methods include converting solids, liquids or gases into gaseous and solid streams that can be separated or exchanged with or without treatment and/or coating steps, and produce optimized composite articles for specific applications.

    专利号:CN-111279015-B
    优先权日:2017-08-24
    标 题 :Manufacturing processes for synthesis, functionalization, surface treatment and/or encapsulation of powders and their applications

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    合成参考文献


    摘要:Joule, J. A., Science of Synthesis Knowledge Updates, (2010) 2, 37.
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